High-Q-factor Al [subscript 2]O[subscript 3] micro-trench cavities integrated with silicon nitride waveguides on silicon

High-Q-factor Al [subscript 2]O[subscript 3] micro-trench cavities integrated with silicon nitride waveguides on silicon

We report on the design and performance of high-Q integrated optical micro-trench cavities on silicon. The microcavities are co-integrated with silicon nitride bus waveguides and fabricated using wafer-scale silicon-photonics-compatible processing steps. The amorphous aluminum oxide resonator materi...

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Bibliographic Details
Main Authors: Su, Zhan, Li, Nanxi, Frankis, Henry C., Magden, Salih, Adam, Thomas N., Leake, Gerald, Coolbaugh, Douglas, Bradley, Jonathan D. B., Watts, Michael
Other Authors: Massachusetts Institute of Technology. Research Laboratory of Electronics
Format: Article
Language:English
Published: The Optical Society 2020
Online Access:https://hdl.handle.net/1721.1/124638

Internet

https://hdl.handle.net/1721.1/124638

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