High-Q-factor Al [subscript 2]O[subscript 3] micro-trench cavities integrated with silicon nitride waveguides on silicon
We report on the design and performance of high-Q integrated optical micro-trench cavities on silicon. The microcavities are co-integrated with silicon nitride bus waveguides and fabricated using wafer-scale silicon-photonics-compatible processing steps. The amorphous aluminum oxide resonator materi...
| Main Authors: | , , , , , , , , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
The Optical Society
2020
|
| Online Access: | https://hdl.handle.net/1721.1/124638 |
| _version_ | 1826204478991237120 |
|---|---|
| author | Su, Zhan Li, Nanxi Frankis, Henry C. Magden, Salih Adam, Thomas N. Leake, Gerald Coolbaugh, Douglas Bradley, Jonathan D. B. Watts, Michael |
| author2 | Massachusetts Institute of Technology. Research Laboratory of Electronics |
| author_facet | Massachusetts Institute of Technology. Research Laboratory of Electronics Su, Zhan Li, Nanxi Frankis, Henry C. Magden, Salih Adam, Thomas N. Leake, Gerald Coolbaugh, Douglas Bradley, Jonathan D. B. Watts, Michael |
| author_sort | Su, Zhan |
| collection | MIT |
| description | We report on the design and performance of high-Q integrated optical micro-trench cavities on silicon. The microcavities are co-integrated with silicon nitride bus waveguides and fabricated using wafer-scale silicon-photonics-compatible processing steps. The amorphous aluminum oxide resonator material is deposited via sputtering in a single straightforward post-processing step. We examine the theoretical and experimental optical properties of the aluminum oxide micro-trench cavities for different bend radii, film thicknesses and near-infrared wavelengths and demonstrate experimental Q factors of > 10[superscript 6]. We propose that this high-Q micro-trench cavity design can be applied to incorporate a wide variety of novel microcavity materials, including rare-earth-doped films for microlasers, into wafer-scale silicon photonics platforms. |
| first_indexed | 2024-09-23T12:56:14Z |
| format | Article |
| id | mit-1721.1/124638 |
| institution | Massachusetts Institute of Technology |
| language | English |
| last_indexed | 2024-09-23T12:56:14Z |
| publishDate | 2020 |
| publisher | The Optical Society |
| record_format | dspace |
| spelling | mit-1721.1/1246382022-09-28T11:00:33Z High-Q-factor Al [subscript 2]O[subscript 3] micro-trench cavities integrated with silicon nitride waveguides on silicon Su, Zhan Li, Nanxi Frankis, Henry C. Magden, Salih Adam, Thomas N. Leake, Gerald Coolbaugh, Douglas Bradley, Jonathan D. B. Watts, Michael Massachusetts Institute of Technology. Research Laboratory of Electronics Massachusetts Institute of Technology. Department of Earth, Atmospheric, and Planetary Sciences We report on the design and performance of high-Q integrated optical micro-trench cavities on silicon. The microcavities are co-integrated with silicon nitride bus waveguides and fabricated using wafer-scale silicon-photonics-compatible processing steps. The amorphous aluminum oxide resonator material is deposited via sputtering in a single straightforward post-processing step. We examine the theoretical and experimental optical properties of the aluminum oxide micro-trench cavities for different bend radii, film thicknesses and near-infrared wavelengths and demonstrate experimental Q factors of > 10[superscript 6]. We propose that this high-Q micro-trench cavity design can be applied to incorporate a wide variety of novel microcavity materials, including rare-earth-doped films for microlasers, into wafer-scale silicon photonics platforms. 2020-04-14T21:15:18Z 2020-04-14T21:15:18Z 2018-04 2018-03 2020-02-28T18:39:37Z Article http://purl.org/eprint/type/JournalArticle 1094-4087 https://hdl.handle.net/1721.1/124638 Su, Zhan, et al. “High-Q-Factor Al 2 O 3 Micro-Trench Cavities Integrated with Silicon Nitride Waveguides on Silicon.” Optics Express 26, 9 (April 2018): 11161. © 2018 Optical Society of America en http://dx.doi.org/10.1364/OE.26.011161 Optics Express Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. application/pdf The Optical Society OSA Publishing |
| spellingShingle | Su, Zhan Li, Nanxi Frankis, Henry C. Magden, Salih Adam, Thomas N. Leake, Gerald Coolbaugh, Douglas Bradley, Jonathan D. B. Watts, Michael High-Q-factor Al [subscript 2]O[subscript 3] micro-trench cavities integrated with silicon nitride waveguides on silicon |
| title | High-Q-factor Al [subscript 2]O[subscript 3] micro-trench cavities integrated with silicon nitride waveguides on silicon |
| title_full | High-Q-factor Al [subscript 2]O[subscript 3] micro-trench cavities integrated with silicon nitride waveguides on silicon |
| title_fullStr | High-Q-factor Al [subscript 2]O[subscript 3] micro-trench cavities integrated with silicon nitride waveguides on silicon |
| title_full_unstemmed | High-Q-factor Al [subscript 2]O[subscript 3] micro-trench cavities integrated with silicon nitride waveguides on silicon |
| title_short | High-Q-factor Al [subscript 2]O[subscript 3] micro-trench cavities integrated with silicon nitride waveguides on silicon |
| title_sort | high q factor al subscript 2 o subscript 3 micro trench cavities integrated with silicon nitride waveguides on silicon |
| url | https://hdl.handle.net/1721.1/124638 |
| work_keys_str_mv | AT suzhan highqfactoralsubscript2osubscript3microtrenchcavitiesintegratedwithsiliconnitridewaveguidesonsilicon AT linanxi highqfactoralsubscript2osubscript3microtrenchcavitiesintegratedwithsiliconnitridewaveguidesonsilicon AT frankishenryc highqfactoralsubscript2osubscript3microtrenchcavitiesintegratedwithsiliconnitridewaveguidesonsilicon AT magdensalih highqfactoralsubscript2osubscript3microtrenchcavitiesintegratedwithsiliconnitridewaveguidesonsilicon AT adamthomasn highqfactoralsubscript2osubscript3microtrenchcavitiesintegratedwithsiliconnitridewaveguidesonsilicon AT leakegerald highqfactoralsubscript2osubscript3microtrenchcavitiesintegratedwithsiliconnitridewaveguidesonsilicon AT coolbaughdouglas highqfactoralsubscript2osubscript3microtrenchcavitiesintegratedwithsiliconnitridewaveguidesonsilicon AT bradleyjonathandb highqfactoralsubscript2osubscript3microtrenchcavitiesintegratedwithsiliconnitridewaveguidesonsilicon AT wattsmichael highqfactoralsubscript2osubscript3microtrenchcavitiesintegratedwithsiliconnitridewaveguidesonsilicon |