Low-loss integrated photonics for the blue and ultraviolet regime

Low-loss integrated photonics for the blue and ultraviolet regime

We present a low-loss integrated photonics platform in the visible and near ultraviolet (UV) regime. Fully etched waveguides based on atomic layer deposition (ALD) of aluminum oxide operate in a single transverse mode with <3 dB/cm propagation loss at a wavelength of 371 nm. Ring resonators with...

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Bibliographic Details
Main Authors: West, Gavin Neal, Loh, William, Kharas, Dave, Sorace-Agaskar, Cheryl, Mehta, Karan Kartik, Sage, Jeremy M., Chiaverini, John, Ram, Rajeev J
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format: Article
Language:English
Published: AIP Publishing 2020
Online Access:https://hdl.handle.net/1721.1/124942

Internet

https://hdl.handle.net/1721.1/124942

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