Low-loss integrated photonics for the blue and ultraviolet regime
We present a low-loss integrated photonics platform in the visible and near ultraviolet (UV) regime. Fully etched waveguides based on atomic layer deposition (ALD) of aluminum oxide operate in a single transverse mode with <3 dB/cm propagation loss at a wavelength of 371 nm. Ring resonators with...
| Main Authors: | , , , , , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
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AIP Publishing
2020
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| Online Access: | https://hdl.handle.net/1721.1/124942 |
| _version_ | 1826199183428681728 |
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| author | West, Gavin Neal Loh, William Kharas, Dave Sorace-Agaskar, Cheryl Mehta, Karan Kartik Sage, Jeremy M. Chiaverini, John Ram, Rajeev J |
| author2 | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science |
| author_facet | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science West, Gavin Neal Loh, William Kharas, Dave Sorace-Agaskar, Cheryl Mehta, Karan Kartik Sage, Jeremy M. Chiaverini, John Ram, Rajeev J |
| author_sort | West, Gavin Neal |
| collection | MIT |
| description | We present a low-loss integrated photonics platform in the visible and near ultraviolet (UV) regime. Fully etched waveguides based on atomic layer deposition (ALD) of aluminum oxide operate in a single transverse mode with <3 dB/cm propagation loss at a wavelength of 371 nm. Ring resonators with intrinsic quality factors exceeding 470 000 are demonstrated at 405 nm, and the thermo-optic coefficient of ALD aluminum oxide is estimated to be 2.75 × 10[superscript −5] (RIU/°C). Absorption loss is sufficiently low to allow on-resonance operation with intra-cavity powers up to at least 12.5 mW, limited by available laser power. Experimental and simulated data indicate that the propagation loss is dominated by sidewall roughness, suggesting that lower loss in the blue and UV is achievable. |
| first_indexed | 2024-09-23T11:15:44Z |
| format | Article |
| id | mit-1721.1/124942 |
| institution | Massachusetts Institute of Technology |
| language | English |
| last_indexed | 2024-09-23T11:15:44Z |
| publishDate | 2020 |
| publisher | AIP Publishing |
| record_format | dspace |
| spelling | mit-1721.1/1249422022-09-27T18:17:15Z Low-loss integrated photonics for the blue and ultraviolet regime West, Gavin Neal Loh, William Kharas, Dave Sorace-Agaskar, Cheryl Mehta, Karan Kartik Sage, Jeremy M. Chiaverini, John Ram, Rajeev J Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Lincoln Laboratory We present a low-loss integrated photonics platform in the visible and near ultraviolet (UV) regime. Fully etched waveguides based on atomic layer deposition (ALD) of aluminum oxide operate in a single transverse mode with <3 dB/cm propagation loss at a wavelength of 371 nm. Ring resonators with intrinsic quality factors exceeding 470 000 are demonstrated at 405 nm, and the thermo-optic coefficient of ALD aluminum oxide is estimated to be 2.75 × 10[superscript −5] (RIU/°C). Absorption loss is sufficiently low to allow on-resonance operation with intra-cavity powers up to at least 12.5 mW, limited by available laser power. Experimental and simulated data indicate that the propagation loss is dominated by sidewall roughness, suggesting that lower loss in the blue and UV is achievable. National Science Foundation (U.S.) (ECCS-1408495) Office of the Assistant Secretary of Defense for Research and Engineering (United States. Air Force. Contract A8721-05-C-0002) 2020-04-30T17:10:07Z 2020-04-30T17:10:07Z 2019-02 2018-08 2019-07-02T15:26:41Z Article http://purl.org/eprint/type/JournalArticle 2378-0967 https://hdl.handle.net/1721.1/124942 West, Gavin N., et al. “Low-Loss Integrated Photonics for the Blue and Ultraviolet Regime.” APL Photonics 4, 2 (February 2019): 026101. © 2019 the Authors en http://dx.doi.org/10.1063/1.5052502 APL Photonics Creative Commons Attribution 4.0 International license https://creativecommons.org/licenses/by/4.0/ application/pdf AIP Publishing American Institute of Physics (AIP) |
| spellingShingle | West, Gavin Neal Loh, William Kharas, Dave Sorace-Agaskar, Cheryl Mehta, Karan Kartik Sage, Jeremy M. Chiaverini, John Ram, Rajeev J Low-loss integrated photonics for the blue and ultraviolet regime |
| title | Low-loss integrated photonics for the blue and ultraviolet regime |
| title_full | Low-loss integrated photonics for the blue and ultraviolet regime |
| title_fullStr | Low-loss integrated photonics for the blue and ultraviolet regime |
| title_full_unstemmed | Low-loss integrated photonics for the blue and ultraviolet regime |
| title_short | Low-loss integrated photonics for the blue and ultraviolet regime |
| title_sort | low loss integrated photonics for the blue and ultraviolet regime |
| url | https://hdl.handle.net/1721.1/124942 |
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