A Silicon MEMS EM vibration energy harvester

A Silicon MEMS EM vibration energy harvester

This paper presents an optimized silicon-MEMS electromagnetic vibration energy harvester suitable for applications such as machine health monitoring. The harvester comprises a DRIE-etched silicon suspension, and pick-and-place N42 NdBFe magnets and copper coils, housed in a 3D-printed package. The h...

Full description

Bibliographic Details
Main Authors: Yang, Ying-Ching Eric, Radhakrishna, Ujwal, Ward, D., Chandrakasan, Anantha P, Lang, Jeffrey H.
Other Authors: Massachusetts Institute of Technology. Research Laboratory of Electronics
Format: Article
Language:English
Published: IOP Publishing 2020
Online Access:https://hdl.handle.net/1721.1/125618

Internet

https://hdl.handle.net/1721.1/125618

Similar Items