Vertical Lamellae Formed by Two-Step Annealing of a Rod-Coil Liquid Crystalline Block Copolymer Thin Film
Silicon-containing block copolymer thin films with high interaction parameter and etch contrast are ideal candidates to generate robust nanotemplates for advanced nanofabrication, but they typically form in-plane oriented microdomains as a result of the dissimilar surface energies of the blocks. Her...
Main Authors: | , , |
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Other Authors: | |
Format: | Article |
Language: | English |
Published: |
American Chemical Society (ACS)
2020
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Online Access: | https://hdl.handle.net/1721.1/125669 |