A Diamond:H/WO3 Metal–Oxide–Semiconductor Field-Effect Transistor

A p-type Diamond:H/WO 3 metal-oxide-semiconductor field-effect transistor (MOSFET) based on surface transfer doping is demonstrated. Using a low-temperature ALD-grown HfO 2 as gate insulator, the Diamond:H/WO 3 MOSFETs show excellent output characteristics, gate-controllable 2-D hole gas, and low ga...

Full description

Bibliographic Details
Main Authors: Yin, Zongyou, Tordjman, Moshe, Vardi, Alon, Kalish, Rafi, del Alamo, Jesus A
Other Authors: Massachusetts Institute of Technology. Microsystems Technology Laboratories
Format: Article
Published: Institute of Electrical and Electronics Engineers (IEEE) 2020
Online Access:https://hdl.handle.net/1721.1/126179