Careful stoichiometry monitoring and doping control during the tunneling interface growth of an n + InAs(Si)/p + GaSb(Si) Esaki diode

In this work, we report on the growth of pseudomorphic and highly doped InAs(Si)/GaSb(Si) heterostructures on p-type (0 0 1)-oriented GaSb substrate and the fabrication and characterization of n+/p+ Esaki tunneling diodes. We particularly study the influence of the Molecular Beam Epitaxy shutter seq...

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Бібліографічні деталі
Автори: El Kazzi, S., Alian, A., Hsu, B., Verhulst, A.S., Walke, A., Favia, P., Douhard, B., Lu, Wenjie, del Alamo, Jesus A, Collaert, N., Merckling, C.
Інші автори: Massachusetts Institute of Technology. Microsystems Technology Laboratories
Формат: Стаття
Опубліковано: Elsevier BV 2020
Онлайн доступ:https://hdl.handle.net/1721.1/126202