Atom sieve for nanometer resolution neutral helium microscopy

Neutral helium microscopy is a new tool for imaging fragile and/or insulating structures as well as structures with large aspect ratios. In one configuration of the microscope, neutral helium atoms are focused as de Broglie matter waves using a Fresnel zone plate. The ultimate resolution is determin...

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Bibliographic Details
Main Authors: Flatabø, Ranveig, Greve, Martin M., Eder, Sabrina D., Kalläne, Matthias, Palau, Adrià Salvador, Berggren, Karl K, Holst, Bodil
Other Authors: Massachusetts Institute of Technology. Research Laboratory of Electronics
Format: Article
Published: American Vacuum Society 2020
Online Access:https://hdl.handle.net/1721.1/126228