Growth, characterization and thermal stability of undoped and in-situ doped silicon-germanium heteroepitaxial layers

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1993.

Bibliographic Details
Main Author:	Jang, Syun-Ming
Other Authors:	Rafael Reif.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Materials Science and Engineering
Online Access:	http://hdl.handle.net/1721.1/12744

Internet

http://hdl.handle.net/1721.1/12744