Growth, characterization and thermal stability of undoped and in-situ doped silicon-germanium heteroepitaxial layers

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1993.

Dades bibliogràfiques
Autor principal:	Jang, Syun-Ming
Altres autors:	Rafael Reif.
Format:	Thesis
Idioma:	eng
Publicat:	Massachusetts Institute of Technology 2005
Matèries:	Materials Science and Engineering
Accés en línia:	http://hdl.handle.net/1721.1/12744

Internet

http://hdl.handle.net/1721.1/12744