Broadband lumped-element parameter extraction method of two-port 3D MEMS in-chip solenoid inductors based on a physics-based equivalent circuit model

Broadband lumped-element parameter extraction method of two-port 3D MEMS in-chip solenoid inductors based on a physics-based equivalent circuit model

Integrated 2D spiral inductors possess low inductance per unit area, which limits their application range. However, the state of investigation into the lumped-element parameter extraction method for integrated 3D in-chip multi-turn solenoid inductors, which possess higher inductance per unit area, i...

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Bibliographic Details
Main Authors: Sun, Jiamian, Li, Haiwang, Wu, Sifan, Xu, Tiantong, Li, Hanqing, Wu, Hanxiao, Xia, Shuangzhi
Other Authors: Massachusetts Institute of Technology. Microsystems Technology Laboratories
Format: Article
Published: Multidisciplinary Digital Publishing Institute 2020
Online Access:https://hdl.handle.net/1721.1/127765

Internet

https://hdl.handle.net/1721.1/127765

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