Broadband lumped-element parameter extraction method of two-port 3D MEMS in-chip solenoid inductors based on a physics-based equivalent circuit model
Integrated 2D spiral inductors possess low inductance per unit area, which limits their application range. However, the state of investigation into the lumped-element parameter extraction method for integrated 3D in-chip multi-turn solenoid inductors, which possess higher inductance per unit area, i...
| Main Authors: | , , , , , , |
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| Other Authors: | |
| Format: | Article |
| Published: |
Multidisciplinary Digital Publishing Institute
2020
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| Online Access: | https://hdl.handle.net/1721.1/127765 |