Poisson’s ratio and residual strain of freestanding ultra-thin films

Poisson’s ratio and residual strain of freestanding ultra-thin films

The Poisson's ratio and residual strain of ultra-thin films (<100 nm) are characterized using the phenomenon of transverse wrinkling in stretched bridges. The test methodology utilizes residual stress driven structures and easy to replicate clean-room fabrication and metrology techniques tha...

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Bibliographic Details
Main Authors: Cuddalorepatta, Gayatri K., Van Rees, Willem Marinus, Han, Li, Pantuso, Daniel, Mahadevan, L., Vlassak, Joost J.
Other Authors: Massachusetts Institute of Technology. Department of Mechanical Engineering
Format: Article
Language:English
Published: Elsevier BV 2020
Online Access:https://hdl.handle.net/1721.1/127841

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https://hdl.handle.net/1721.1/127841

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