3D integrated photonics platform with deterministic geometry control

3D integrated photonics platform with deterministic geometry control

3D photonics promises to expand the reach of photonics by enabling the extension of traditional applications to nonplanar geometries and adding novel functionalities that cannot be attained with planar devices. Available material options and device geometries are, however, limited by current fabrica...

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Bibliographic Details
Main Authors: Michon, Jerome, Geiger, Sarah J., Li, Lan, Goncalves, Claudia, Lin, Hongtao, Richardson, Kathleen, Jia, Xinqiao, Hu, Juejun
Other Authors: Massachusetts Institute of Technology. Department of Materials Science and Engineering
Format: Article
Language:English
Published: Optical Society of America (OSA) 2020
Online Access:https://hdl.handle.net/1721.1/128025

Internet

https://hdl.handle.net/1721.1/128025

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