3D integrated photonics platform with deterministic geometry control
3D photonics promises to expand the reach of photonics by enabling the extension of traditional applications to nonplanar geometries and adding novel functionalities that cannot be attained with planar devices. Available material options and device geometries are, however, limited by current fabrica...
| Main Authors: | , , , , , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
Optical Society of America (OSA)
2020
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| Online Access: | https://hdl.handle.net/1721.1/128025 |
| _version_ | 1826189425387765760 |
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| author | Michon, Jerome Geiger, Sarah J. Li, Lan Goncalves, Claudia Lin, Hongtao Richardson, Kathleen Jia, Xinqiao Hu, Juejun |
| author2 | Massachusetts Institute of Technology. Department of Materials Science and Engineering |
| author_facet | Massachusetts Institute of Technology. Department of Materials Science and Engineering Michon, Jerome Geiger, Sarah J. Li, Lan Goncalves, Claudia Lin, Hongtao Richardson, Kathleen Jia, Xinqiao Hu, Juejun |
| author_sort | Michon, Jerome |
| collection | MIT |
| description | 3D photonics promises to expand the reach of photonics by enabling the extension of traditional applications to nonplanar geometries and adding novel functionalities that cannot be attained with planar devices. Available material options and device geometries are, however, limited by current fabrication methods. In this work, we pioneer a method that allows for placement of integrated photonic device arrays at arbitrary predefined locations in 3D using a fabrication process that capitalizes on the buckling of a 2D pattern. We present theoretical and experimental validation of the deterministic buckling process, thus demonstrating implementation of the technique to realize what we believe to be the first fully packaged 3D integrated photonics platform. Application of the platform for mechanical strain sensing is further demonstrated. |
| first_indexed | 2024-09-23T08:14:47Z |
| format | Article |
| id | mit-1721.1/128025 |
| institution | Massachusetts Institute of Technology |
| language | English |
| last_indexed | 2024-09-23T08:14:47Z |
| publishDate | 2020 |
| publisher | Optical Society of America (OSA) |
| record_format | dspace |
| spelling | mit-1721.1/1280252022-09-30T08:34:53Z 3D integrated photonics platform with deterministic geometry control Michon, Jerome Geiger, Sarah J. Li, Lan Goncalves, Claudia Lin, Hongtao Richardson, Kathleen Jia, Xinqiao Hu, Juejun Massachusetts Institute of Technology. Department of Materials Science and Engineering 3D photonics promises to expand the reach of photonics by enabling the extension of traditional applications to nonplanar geometries and adding novel functionalities that cannot be attained with planar devices. Available material options and device geometries are, however, limited by current fabrication methods. In this work, we pioneer a method that allows for placement of integrated photonic device arrays at arbitrary predefined locations in 3D using a fabrication process that capitalizes on the buckling of a 2D pattern. We present theoretical and experimental validation of the deterministic buckling process, thus demonstrating implementation of the technique to realize what we believe to be the first fully packaged 3D integrated photonics platform. Application of the platform for mechanical strain sensing is further demonstrated. 2020-10-16T19:58:16Z 2020-10-16T19:58:16Z 2020-01 2020-10-05T14:33:22Z Article http://purl.org/eprint/type/JournalArticle 2327-9125 https://hdl.handle.net/1721.1/128025 Michon, Jérôme et al. "3D integrated photonics platform with deterministic geometry control." Photonics Research 8, 2 (January 2020): 194-201 © 2020 Chinese Laser Press en http://dx.doi.org/10.1364/prj.375584 Photonics Research Creative Commons Attribution-Noncommercial-Share Alike http://creativecommons.org/licenses/by-nc-sa/4.0/ application/pdf Optical Society of America (OSA) Prof. Hu via Ye Li |
| spellingShingle | Michon, Jerome Geiger, Sarah J. Li, Lan Goncalves, Claudia Lin, Hongtao Richardson, Kathleen Jia, Xinqiao Hu, Juejun 3D integrated photonics platform with deterministic geometry control |
| title | 3D integrated photonics platform with deterministic geometry control |
| title_full | 3D integrated photonics platform with deterministic geometry control |
| title_fullStr | 3D integrated photonics platform with deterministic geometry control |
| title_full_unstemmed | 3D integrated photonics platform with deterministic geometry control |
| title_short | 3D integrated photonics platform with deterministic geometry control |
| title_sort | 3d integrated photonics platform with deterministic geometry control |
| url | https://hdl.handle.net/1721.1/128025 |
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