Design and fabrication of a thin film micromachined accelerometer

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1992.

Bibliographic Details
Main Author:	Novack, Mitchell J. (Mitchell Joseph)
Other Authors:	Martin A. Schmidt.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Mechanical Engineering
Online Access:	http://hdl.handle.net/1721.1/12917

Internet

http://hdl.handle.net/1721.1/12917