Design and fabrication of a thin film micromachined accelerometer
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1992.
| Main Author: | |
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| Other Authors: | |
| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/12917 |
| _version_ | 1811073529381126144 |
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| author | Novack, Mitchell J. (Mitchell Joseph) |
| author2 | Martin A. Schmidt. |
| author_facet | Martin A. Schmidt. Novack, Mitchell J. (Mitchell Joseph) |
| author_sort | Novack, Mitchell J. (Mitchell Joseph) |
| collection | MIT |
| description | Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1992. |
| first_indexed | 2024-09-23T09:34:26Z |
| format | Thesis |
| id | mit-1721.1/12917 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T09:34:26Z |
| publishDate | 2005 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/129172019-04-12T09:42:49Z Design and fabrication of a thin film micromachined accelerometer Novack, Mitchell J. (Mitchell Joseph) Martin A. Schmidt. Massachusetts Institute of Technology. Dept. of Mechanical Engineering Mechanical Engineering Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1992. Includes bibliographical references (leaves 156-160). by Mitchell J. Novack. M.S. 2005-08-15T19:43:07Z 2005-08-15T19:43:07Z 1992 1992 Thesis http://hdl.handle.net/1721.1/12917 27911130 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 160 leaves 7892045 bytes 7891799 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Mechanical Engineering Novack, Mitchell J. (Mitchell Joseph) Design and fabrication of a thin film micromachined accelerometer |
| title | Design and fabrication of a thin film micromachined accelerometer |
| title_full | Design and fabrication of a thin film micromachined accelerometer |
| title_fullStr | Design and fabrication of a thin film micromachined accelerometer |
| title_full_unstemmed | Design and fabrication of a thin film micromachined accelerometer |
| title_short | Design and fabrication of a thin film micromachined accelerometer |
| title_sort | design and fabrication of a thin film micromachined accelerometer |
| topic | Mechanical Engineering |
| url | http://hdl.handle.net/1721.1/12917 |
| work_keys_str_mv | AT novackmitchelljmitchelljoseph designandfabricationofathinfilmmicromachinedaccelerometer |