Accurate characterization of nanophotonic grating structures

Thesis: M. Eng., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, February, 2020

Bibliographic Details
Main Author: Yeung, Wings T.
Other Authors: Cardinal Warde and Jinxin Fu.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2021
Subjects:
Online Access:https://hdl.handle.net/1721.1/129848