Accurate characterization of nanophotonic grating structures
Thesis: M. Eng., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, February, 2020
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| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2021
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| Online Access: | https://hdl.handle.net/1721.1/129848 |
| _version_ | 1826202008381554688 |
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| author | Yeung, Wings T. |
| author2 | Cardinal Warde and Jinxin Fu. |
| author_facet | Cardinal Warde and Jinxin Fu. Yeung, Wings T. |
| author_sort | Yeung, Wings T. |
| collection | MIT |
| description | Thesis: M. Eng., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, February, 2020 |
| first_indexed | 2024-09-23T12:00:25Z |
| format | Thesis |
| id | mit-1721.1/129848 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T12:00:25Z |
| publishDate | 2021 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/1298482021-02-20T03:22:48Z Accurate characterization of nanophotonic grating structures Yeung, Wings T. Cardinal Warde and Jinxin Fu. Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science. Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Electrical Engineering and Computer Science. Thesis: M. Eng., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, February, 2020 Cataloged from student-submitted PDF of thesis. Includes bibliographical references (page 75). Augmented reality waveguides are designed to have grating regions to in-couple, out-couple, and propagate light from a light engine to the user. This thesis develops two reliable systems to qualify manufactured waveguides. The first system determines grating quality by measuring grating pitch and orientation uniformity across grating regions. The system uses scatterometry in Littrow configuration and captures both the reflected zeroth and first order diffracted light. The second system determines the overall quality of a waveguide by measuring the resolution of the device using a Modulation Transfer Function, MTF, technique. MTF is commonly measured using either the line pair method or the slant edge method. This thesis proposes a new method to measure MTF using single pixel illumination and point spread function. Results from the two systems are presented, and the capabilities and limitations of each system are explored. by Wings T. Yeung. M. Eng. M.Eng. Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science 2021-02-19T20:17:25Z 2021-02-19T20:17:25Z 2020 2020 Thesis https://hdl.handle.net/1721.1/129848 1237567531 eng MIT theses may be protected by copyright. Please reuse MIT thesis content according to the MIT Libraries Permissions Policy, which is available through the URL provided. http://dspace.mit.edu/handle/1721.1/7582 75 pages application/pdf Massachusetts Institute of Technology |
| spellingShingle | Electrical Engineering and Computer Science. Yeung, Wings T. Accurate characterization of nanophotonic grating structures |
| title | Accurate characterization of nanophotonic grating structures |
| title_full | Accurate characterization of nanophotonic grating structures |
| title_fullStr | Accurate characterization of nanophotonic grating structures |
| title_full_unstemmed | Accurate characterization of nanophotonic grating structures |
| title_short | Accurate characterization of nanophotonic grating structures |
| title_sort | accurate characterization of nanophotonic grating structures |
| topic | Electrical Engineering and Computer Science. |
| url | https://hdl.handle.net/1721.1/129848 |
| work_keys_str_mv | AT yeungwingst accuratecharacterizationofnanophotonicgratingstructures |