Comparison of Radio-Frequency Power Architectures for Plasma Generation
Applications such as plasma generation require the generation and delivery of radio-frequency (rf) power into widely-varying loads while simultaneously demanding high accuracy and speed in controlling the output power across a wide range of power levels. Attaining high efficiency and performance acr...
| Main Authors: | , , , , |
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| Format: | Article |
| Published: |
Institute of Electrical and Electronics Engineers (IEEE)
2021
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| Online Access: | https://hdl.handle.net/1721.1/130101 |