Fabrication of large-area 100 nm-period gratings using achromatic holographic lithography

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1992.

Bibliografische gegevens
Hoofdauteur:	Yen, Anthony
Andere auteurs:	Henry I. Smith.
Formaat:	Thesis
Taal:	eng
Gepubliceerd in:	Massachusetts Institute of Technology 2005
Onderwerpen:	Electrical Engineering and Computer Science
Online toegang:	http://hdl.handle.net/1721.1/13078

Internet

http://hdl.handle.net/1721.1/13078