Reactive chemisorption of molecular fluorine on Si(100)

Thesis: Ph. D., Massachusetts Institute of Technology, Department of Chemistry, 1989

Bibliographic Details
Main Author:	McGonigal, Marianne.
Other Authors:	Sylvia T. Ceyer.
Format:	Thesis
Published:	Massachusetts Institute of Technology 2021
Subjects:	Chemistry.
Online Access:	https://hdl.handle.net/1721.1/130998

Internet

https://hdl.handle.net/1721.1/130998