Photonic topology optimization with semiconductor-foundry design-rule constraints
We present a unified density-based topology-optimization framework that yields integrated photonic designs optimized for manufacturing constraints including all those of commercial semiconductor foundries. We introduce a new method to impose minimum-area and minimum-enclosed-area constraints, and si...
| Main Authors: | , , , |
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| Other Authors: | |
| Format: | Article |
| Published: |
The Optical Society
2021
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| Online Access: | https://hdl.handle.net/1721.1/131097 |