Photonic topology optimization with semiconductor-foundry design-rule constraints
We present a unified density-based topology-optimization framework that yields integrated photonic designs optimized for manufacturing constraints including all those of commercial semiconductor foundries. We introduce a new method to impose minimum-area and minimum-enclosed-area constraints, and si...
| Main Authors: | , , , |
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| Format: | Article |
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The Optical Society
2021
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| Online Access: | https://hdl.handle.net/1721.1/131097 |
| _version_ | 1826205295460745216 |
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| author | Hammond, Alec Oskooi, Ardavan Johnson, Steven G Ralph, Stephen |
| author2 | Massachusetts Institute of Technology. Department of Mathematics |
| author_facet | Massachusetts Institute of Technology. Department of Mathematics Hammond, Alec Oskooi, Ardavan Johnson, Steven G Ralph, Stephen |
| author_sort | Hammond, Alec |
| collection | MIT |
| description | We present a unified density-based topology-optimization framework that yields integrated photonic designs optimized for manufacturing constraints including all those of commercial semiconductor foundries. We introduce a new method to impose minimum-area and minimum-enclosed-area constraints, and simultaneously adapt previous techniques for minimum linewidth, linespacing, and curvature, all of which are implemented without any additional re-parameterizations. Furthermore, we show how differentiable morphological transforms can be used to produce devices that are robust to over/under-etching while also satisfying manufacturing constraints. We demonstrate our methodology by designing three broadband silicon-photonics devices for nine different foundry-constraint combinations. |
| first_indexed | 2024-09-23T13:10:45Z |
| format | Article |
| id | mit-1721.1/131097 |
| institution | Massachusetts Institute of Technology |
| last_indexed | 2024-09-23T13:10:45Z |
| publishDate | 2021 |
| publisher | The Optical Society |
| record_format | dspace |
| spelling | mit-1721.1/1310972022-10-01T13:33:29Z Photonic topology optimization with semiconductor-foundry design-rule constraints Hammond, Alec Oskooi, Ardavan Johnson, Steven G Ralph, Stephen Massachusetts Institute of Technology. Department of Mathematics We present a unified density-based topology-optimization framework that yields integrated photonic designs optimized for manufacturing constraints including all those of commercial semiconductor foundries. We introduce a new method to impose minimum-area and minimum-enclosed-area constraints, and simultaneously adapt previous techniques for minimum linewidth, linespacing, and curvature, all of which are implemented without any additional re-parameterizations. Furthermore, we show how differentiable morphological transforms can be used to produce devices that are robust to over/under-etching while also satisfying manufacturing constraints. We demonstrate our methodology by designing three broadband silicon-photonics devices for nine different foundry-constraint combinations. Army Research Office (W911NF-18-2-0048) Small Business Innovation Research (1647206, 1758596) 2021-07-14T18:55:04Z 2021-07-14T18:55:04Z 2021-06 Article http://purl.org/eprint/type/JournalArticle 1094-4087 https://hdl.handle.net/1721.1/131097 Hammond, Alec et al. "Photonic topology optimization with semiconductor-foundry design-rule constraints." Optics Express 29, 15 (June 2021): 23916-23938. © 2021 Optical Society of America http://dx.doi.org/10.1364/oe.431188 Optics Express Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. application/pdf The Optical Society Steven Johnson |
| spellingShingle | Hammond, Alec Oskooi, Ardavan Johnson, Steven G Ralph, Stephen Photonic topology optimization with semiconductor-foundry design-rule constraints |
| title | Photonic topology optimization with semiconductor-foundry design-rule constraints |
| title_full | Photonic topology optimization with semiconductor-foundry design-rule constraints |
| title_fullStr | Photonic topology optimization with semiconductor-foundry design-rule constraints |
| title_full_unstemmed | Photonic topology optimization with semiconductor-foundry design-rule constraints |
| title_short | Photonic topology optimization with semiconductor-foundry design-rule constraints |
| title_sort | photonic topology optimization with semiconductor foundry design rule constraints |
| url | https://hdl.handle.net/1721.1/131097 |
| work_keys_str_mv | AT hammondalec photonictopologyoptimizationwithsemiconductorfoundrydesignruleconstraints AT oskooiardavan photonictopologyoptimizationwithsemiconductorfoundrydesignruleconstraints AT johnsonsteveng photonictopologyoptimizationwithsemiconductorfoundrydesignruleconstraints AT ralphstephen photonictopologyoptimizationwithsemiconductorfoundrydesignruleconstraints |