Metalorganic chemical vapor deposition of aluminum nitride and gallium nitride

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1992.

Bibliographic Details
Main Author: Ho, Kwok-Lun
Other Authors: Klaus F. Jensen.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Online Access:http://hdl.handle.net/1721.1/13142