Metalorganic chemical vapor deposition of aluminum nitride and gallium nitride

Metalorganic chemical vapor deposition of aluminum nitride and gallium nitride

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1992.

Bibliographic Details
Main Author:	Ho, Kwok-Lun
Other Authors:	Klaus F. Jensen.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Chemical Engineering
Online Access:	http://hdl.handle.net/1721.1/13142

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