Metalorganic chemical vapor deposition of aluminum nitride and gallium nitride
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1992.
Main Author: | Ho, Kwok-Lun |
---|---|
Other Authors: | Klaus F. Jensen. |
Format: | Thesis |
Language: | eng |
Published: |
Massachusetts Institute of Technology
2005
|
Subjects: | |
Online Access: | http://hdl.handle.net/1721.1/13142 |
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