Beam simulation studies of plasma-surface interactions in fluorocarbon etching of Si and SiO2

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1992.

Bibliographic Details
Main Author:	Gray, David Charles
Other Authors:	Herbert H. Sawin.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Chemical Engineering
Online Access:	http://hdl.handle.net/1721.1/13187

Internet

http://hdl.handle.net/1721.1/13187