Photonic device sensitivity analysis methods: towards process variation-aware silicon photonics design

Photonic device sensitivity analysis methods: towards process variation-aware silicon photonics design

Show other versions (1)

© COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only. Silicon photonics offers the ability to fabricate and integrate photonic and electronic components using existing integrated circuit fabrication infrastructure. Recent work seeks to understand the impact of IC process...

Full description

Bibliographic Details
Main Authors: El-Henawy, Sally I., Zhang, Zhengxing, Miller, Ryan, Boning, Duane S
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format: Article
Language:English
Published: SPIE-Intl Soc Optical Eng 2022
Online Access:https://hdl.handle.net/1721.1/132246.2

Internet

https://hdl.handle.net/1721.1/132246.2

Similar Items