A liquid-shear-stress sensor using wafer-bonding technology

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1990.

Bibliographic Details
Main Author: Ng, Kay-Yip
Other Authors: Martin A. Schmidt.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Online Access:http://hdl.handle.net/1721.1/13434