Modeling, optimization, and control of spatial uniformity in manufacturing processes

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1991.

Bibliographic Details
Main Author:	Guo, Ruey-Shan
Other Authors:	Emanuel Sachs.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Mechanical Engineering
Online Access:	http://hdl.handle.net/1721.1/13459

Internet

http://hdl.handle.net/1721.1/13459