Modeling, optimization, and control of spatial uniformity in manufacturing processes

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1991.

书目详细资料
主要作者: Guo, Ruey-Shan
其他作者: Emanuel Sachs.
格式: Thesis
语言:eng
出版: Massachusetts Institute of Technology 2005
主题:
在线阅读:http://hdl.handle.net/1721.1/13459