Measuring thickness in thin NbN films for superconducting devices
© 2019 Author(s). The authors present the use of a commercially available fixed-angle multiwavelength ellipsometer for quickly measuring the thickness of NbN thin films for the fabrication and performance improvement of superconducting nanowire single photon detectors. The process can determine the...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
American Vacuum Society
2021
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| Online Access: | https://hdl.handle.net/1721.1/134920 |