Measuring thickness in thin NbN films for superconducting devices
© 2019 Author(s). The authors present the use of a commercially available fixed-angle multiwavelength ellipsometer for quickly measuring the thickness of NbN thin films for the fabrication and performance improvement of superconducting nanowire single photon detectors. The process can determine the...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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American Vacuum Society
2021
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| Online Access: | https://hdl.handle.net/1721.1/134920 |
| _version_ | 1826200376207998976 |
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| author | Medeiros, Owen Colangelo, Marco Charaev, Ilya Berggren, Karl K |
| author_facet | Medeiros, Owen Colangelo, Marco Charaev, Ilya Berggren, Karl K |
| author_sort | Medeiros, Owen |
| collection | MIT |
| description | © 2019 Author(s). The authors present the use of a commercially available fixed-angle multiwavelength ellipsometer for quickly measuring the thickness of NbN thin films for the fabrication and performance improvement of superconducting nanowire single photon detectors. The process can determine the optical constants of absorbing thin films, removing the need for inaccurate approximations. The tool can be used to observe oxidation growth and allows thickness measurements to be integrated into the characterization of various fabrication processes. |
| first_indexed | 2024-09-23T11:35:26Z |
| format | Article |
| id | mit-1721.1/134920 |
| institution | Massachusetts Institute of Technology |
| language | English |
| last_indexed | 2024-09-23T11:35:26Z |
| publishDate | 2021 |
| publisher | American Vacuum Society |
| record_format | dspace |
| spelling | mit-1721.1/1349202021-10-28T04:14:23Z Measuring thickness in thin NbN films for superconducting devices Medeiros, Owen Colangelo, Marco Charaev, Ilya Berggren, Karl K © 2019 Author(s). The authors present the use of a commercially available fixed-angle multiwavelength ellipsometer for quickly measuring the thickness of NbN thin films for the fabrication and performance improvement of superconducting nanowire single photon detectors. The process can determine the optical constants of absorbing thin films, removing the need for inaccurate approximations. The tool can be used to observe oxidation growth and allows thickness measurements to be integrated into the characterization of various fabrication processes. 2021-10-27T20:09:51Z 2021-10-27T20:09:51Z 2019 2020-12-01T19:24:16Z Article http://purl.org/eprint/type/JournalArticle https://hdl.handle.net/1721.1/134920 en 10.1116/1.5088061 Journal of Vacuum Science and Technology A Vacuum Surfaces and Films Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. application/pdf American Vacuum Society American Institute of Physics (AIP) |
| spellingShingle | Medeiros, Owen Colangelo, Marco Charaev, Ilya Berggren, Karl K Measuring thickness in thin NbN films for superconducting devices |
| title | Measuring thickness in thin NbN films for superconducting devices |
| title_full | Measuring thickness in thin NbN films for superconducting devices |
| title_fullStr | Measuring thickness in thin NbN films for superconducting devices |
| title_full_unstemmed | Measuring thickness in thin NbN films for superconducting devices |
| title_short | Measuring thickness in thin NbN films for superconducting devices |
| title_sort | measuring thickness in thin nbn films for superconducting devices |
| url | https://hdl.handle.net/1721.1/134920 |
| work_keys_str_mv | AT medeirosowen measuringthicknessinthinnbnfilmsforsuperconductingdevices AT colangelomarco measuringthicknessinthinnbnfilmsforsuperconductingdevices AT charaevilya measuringthicknessinthinnbnfilmsforsuperconductingdevices AT berggrenkarlk measuringthicknessinthinnbnfilmsforsuperconductingdevices |