Measuring thickness in thin NbN films for superconducting devices

© 2019 Author(s). The authors present the use of a commercially available fixed-angle multiwavelength ellipsometer for quickly measuring the thickness of NbN thin films for the fabrication and performance improvement of superconducting nanowire single photon detectors. The process can determine the...

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Bibliographic Details
Main Authors: Medeiros, Owen, Colangelo, Marco, Charaev, Ilya, Berggren, Karl K
Format: Article
Language:English
Published: American Vacuum Society 2021
Online Access:https://hdl.handle.net/1721.1/134920

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