Characterization of laser thermal loading on microelectromechanical systems-based fast steering mirror in vacuum
© The Authors. Microelectromechanical systems (MEMS) have produced high-quality, high-bandwidth, small form factor, and inexpensive fast steering mirror (FSM) devices potentially suitable for a large variety of applications, such as image stabilization and beam pointing in satellite-based and ground...
| Main Authors: | , , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
SPIE-Intl Soc Optical Eng
2021
|
| Online Access: | https://hdl.handle.net/1721.1/135212 |