Nanostructured-membrane electron phase plates

Nanostructured-membrane electron phase plates

© 2020 Elsevier B.V. Electron beams can acquire designed phase modulations by passing through nanostructured material phase plates. These phase modulations enable electron wavefront shaping and benefit electron microscopy, spectroscopy, lithography, and interferometry. However, in the fabrication of...

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Bibliographic Details
Main Authors: Yang, Yujia, Kim, Chung-Soo, Hobbs, Richard G, Keathley, Phillip D, Berggren, Karl K
Other Authors: Massachusetts Institute of Technology. Research Laboratory of Electronics
Format: Article
Language:English
Published: Elsevier BV 2021
Online Access:https://hdl.handle.net/1721.1/135488

Internet

https://hdl.handle.net/1721.1/135488

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