Device structures for microelectronic gas sensors.

Massachusetts Institute of Technology. Dept. of Electrical Engineering. Thesis. 1974. Elec.E.

Bibliographic Details
Main Author: Wishneusky, John Andrew
Other Authors: Stephen D. Senturia.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Online Access:http://hdl.handle.net/1721.1/13573