Monolithic on-chip mid-IR methane gas sensor with waveguide-integrated detector

Monolithic on-chip mid-IR methane gas sensor with waveguide-integrated detector

© 2019 Author(s). We demonstrate a monolithic waveguide sensor integrated with a detector on-chip for mid-infrared absorption spectroscopic sensing. The optical sensing element comprises a chalcogenide glass spiral waveguide, and the detector is a PbTe photoconductor integrated directly with the cha...

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Bibliographic Details
Main Authors: Su, P, Han, Z, Kita, D, Becla, P, Lin, H, Deckoff-Jones, S, Richardson, K, Kimerling, LC, Hu, J, Agarwal, A
Other Authors: Massachusetts Institute of Technology. Department of Materials Science and Engineering
Format: Article
Language:English
Published: AIP Publishing 2021
Online Access:https://hdl.handle.net/1721.1/135875

Internet

https://hdl.handle.net/1721.1/135875

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