Fundamental scaling laws for the direct-write chemical vapor deposition of nanoscale features: modeling mass transport around a translating nanonozzle
© 2019 The Royal Society of Chemistry. The nanometer placement of nanomaterials, such as nanoribbons and nanotubes, at a specific pitch and orientation on a surface, remains an unsolved fundamental problem in nanotechnology. In this work, we introduce and analyze the concept of a direct-write chemic...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
Royal Society of Chemistry (RSC)
2021
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Online Access: | https://hdl.handle.net/1721.1/135884 |