Fundamental scaling laws for the direct-write chemical vapor deposition of nanoscale features: modeling mass transport around a translating nanonozzle
© 2019 The Royal Society of Chemistry. The nanometer placement of nanomaterials, such as nanoribbons and nanotubes, at a specific pitch and orientation on a surface, remains an unsolved fundamental problem in nanotechnology. In this work, we introduce and analyze the concept of a direct-write chemic...
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| Format: | Article |
| Language: | English |
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Royal Society of Chemistry (RSC)
2021
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| Online Access: | https://hdl.handle.net/1721.1/135884 |
| _version_ | 1826204441433341952 |
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| author | Drahushuk, Lee W Govind Rajan, Ananth Strano, Michael S |
| author_facet | Drahushuk, Lee W Govind Rajan, Ananth Strano, Michael S |
| author_sort | Drahushuk, Lee W |
| collection | MIT |
| description | © 2019 The Royal Society of Chemistry. The nanometer placement of nanomaterials, such as nanoribbons and nanotubes, at a specific pitch and orientation on a surface, remains an unsolved fundamental problem in nanotechnology. In this work, we introduce and analyze the concept of a direct-write chemical vapor deposition (CVD) system that enables the in-place synthesis of such structures with control over orientation and characteristic features. A nanometer scale pore or conduit, called the nanonozzle, delivers precursor gases for CVD locally on a substrate, with spatial translation of either the nozzle or the substrate to enable a novel direct write (DW) tool. We analyze the nozzle under conditions where it delivers reactants to a substrate while translating at a constant velocity over the surface at a fixed reaction temperature. We formulate and solve a multi-phase three-dimensional reaction and diffusion model of the direct-write operation, and evaluate specific analytically-solvable limits to determine the allowable operating conditions, including pore dimensions, reactant flow rates, and nozzle translation speed. A Buckingham Π analysis identifies six dimensionless quantities crucial for the design and operation of the direct-write synthesis process. Importantly, we derive and validate what we call the ribbon extension inequality that brackets the allowable nozzle velocity relative to the CVD growth rate-a key constraint to enabling direct-write operation. Lastly, we include a practical analysis using attainable values towards the experimental design of such a system, building the nozzle around a commercially available near-field scanning optical microscopy (NSOM) tip as a feasible example. |
| first_indexed | 2024-09-23T12:55:06Z |
| format | Article |
| id | mit-1721.1/135884 |
| institution | Massachusetts Institute of Technology |
| language | English |
| last_indexed | 2024-09-23T12:55:06Z |
| publishDate | 2021 |
| publisher | Royal Society of Chemistry (RSC) |
| record_format | dspace |
| spelling | mit-1721.1/1358842021-10-28T03:58:55Z Fundamental scaling laws for the direct-write chemical vapor deposition of nanoscale features: modeling mass transport around a translating nanonozzle Drahushuk, Lee W Govind Rajan, Ananth Strano, Michael S © 2019 The Royal Society of Chemistry. The nanometer placement of nanomaterials, such as nanoribbons and nanotubes, at a specific pitch and orientation on a surface, remains an unsolved fundamental problem in nanotechnology. In this work, we introduce and analyze the concept of a direct-write chemical vapor deposition (CVD) system that enables the in-place synthesis of such structures with control over orientation and characteristic features. A nanometer scale pore or conduit, called the nanonozzle, delivers precursor gases for CVD locally on a substrate, with spatial translation of either the nozzle or the substrate to enable a novel direct write (DW) tool. We analyze the nozzle under conditions where it delivers reactants to a substrate while translating at a constant velocity over the surface at a fixed reaction temperature. We formulate and solve a multi-phase three-dimensional reaction and diffusion model of the direct-write operation, and evaluate specific analytically-solvable limits to determine the allowable operating conditions, including pore dimensions, reactant flow rates, and nozzle translation speed. A Buckingham Π analysis identifies six dimensionless quantities crucial for the design and operation of the direct-write synthesis process. Importantly, we derive and validate what we call the ribbon extension inequality that brackets the allowable nozzle velocity relative to the CVD growth rate-a key constraint to enabling direct-write operation. Lastly, we include a practical analysis using attainable values towards the experimental design of such a system, building the nozzle around a commercially available near-field scanning optical microscopy (NSOM) tip as a feasible example. 2021-10-27T20:29:48Z 2021-10-27T20:29:48Z 2019 2021-06-15T12:28:01Z Article http://purl.org/eprint/type/JournalArticle https://hdl.handle.net/1721.1/135884 en 10.1039/C8NR10366F Nanoscale Creative Commons Attribution-Noncommercial-Share Alike http://creativecommons.org/licenses/by-nc-sa/4.0/ application/pdf Royal Society of Chemistry (RSC) Royal Society of Chemistry (RSC) |
| spellingShingle | Drahushuk, Lee W Govind Rajan, Ananth Strano, Michael S Fundamental scaling laws for the direct-write chemical vapor deposition of nanoscale features: modeling mass transport around a translating nanonozzle |
| title | Fundamental scaling laws for the direct-write chemical vapor deposition of nanoscale features: modeling mass transport around a translating nanonozzle |
| title_full | Fundamental scaling laws for the direct-write chemical vapor deposition of nanoscale features: modeling mass transport around a translating nanonozzle |
| title_fullStr | Fundamental scaling laws for the direct-write chemical vapor deposition of nanoscale features: modeling mass transport around a translating nanonozzle |
| title_full_unstemmed | Fundamental scaling laws for the direct-write chemical vapor deposition of nanoscale features: modeling mass transport around a translating nanonozzle |
| title_short | Fundamental scaling laws for the direct-write chemical vapor deposition of nanoscale features: modeling mass transport around a translating nanonozzle |
| title_sort | fundamental scaling laws for the direct write chemical vapor deposition of nanoscale features modeling mass transport around a translating nanonozzle |
| url | https://hdl.handle.net/1721.1/135884 |
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