Fundamental scaling laws for the direct-write chemical vapor deposition of nanoscale features: modeling mass transport around a translating nanonozzle

© 2019 The Royal Society of Chemistry. The nanometer placement of nanomaterials, such as nanoribbons and nanotubes, at a specific pitch and orientation on a surface, remains an unsolved fundamental problem in nanotechnology. In this work, we introduce and analyze the concept of a direct-write chemic...

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Bibliographic Details
Main Authors: Drahushuk, Lee W, Govind Rajan, Ananth, Strano, Michael S
Format: Article
Language:English
Published: Royal Society of Chemistry (RSC) 2021
Online Access:https://hdl.handle.net/1721.1/135884