Growth and characterization of low temperature silicon selective epitaxy

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1990.

Bibliographic Details
Main Author:	Yew, Tri-Rung
Other Authors:	Rafael Reif.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Materials Science and Engineering
Online Access:	http://hdl.handle.net/1721.1/13640

Internet

http://hdl.handle.net/1721.1/13640