Buckled MEMS Beams for Energy Harvesting from Low Frequency Vibrations
Copyright © 2019 Ruize Xu et al. Vibration energy harvesters based on the resonance of the beam structure work effectively only when the operating frequency window of the beam resonance matches with the available vibration source. None of the resonating MEMS structures can operate with low frequency...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
American Association for the Advancement of Science (AAAS)
2021
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| Online Access: | https://hdl.handle.net/1721.1/136449 |