Vertically integrated modeling of light-induced defects: Process modeling, degradation kinetics and device impact

National Science Foundation (U.S.) (CA No. EEC-1041895)

Bibliographic Details
Main Authors:	Laine, Hannu S., Vahlman, Henri, Haarahiltunen, Antti, Jensen, Mallory Ann, Modanese, Chiara, Wagner, Matthias, Wolny, Franziska, Buonassisi, Anthony, Savin, Hele
Other Authors:	Massachusetts Institute of Technology. Department of Mechanical Engineering
Format:	Article
Language:	English
Published:	Author(s) 2021
Online Access:	https://hdl.handle.net/1721.1/136720.2

Internet

https://hdl.handle.net/1721.1/136720.2