Fabrication of Six Degrees-of-Freedom Hexflex Positioner With Integrated Strain Sensing Using Nonlithographically Based Microfabrication
© 2021 BMJ Publishing Group. All rights reserved. A process flow is described for the low cost, flexible fabrication of metal micro-electromechanical systems (MEMS) with high performance integrated sensing. The process is capable of producing new designs in ≈1 week at an average unit cost of <1 k...
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| Format: | Article |
| Language: | English |
| Published: |
ASME International
2021
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| Online Access: | https://hdl.handle.net/1721.1/138509 |