Experimental characterization and physical modeling of resolution limits in proximity printing x-ray lithography

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1991.

Bibliographic Details
Main Author:	Early, Kathleen
Other Authors:	Henry I. Smith.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Electrical Engineering and Computer Science
Online Access:	http://hdl.handle.net/1721.1/13852

Internet

http://hdl.handle.net/1721.1/13852