Experimental characterization and physical modeling of resolution limits in proximity printing x-ray lithography
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1991.
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| 格式: | Thesis |
| 语言: | eng |
| 出版: |
Massachusetts Institute of Technology
2005
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| 主题: | |
| 在线阅读: | http://hdl.handle.net/1721.1/13852 |
| _version_ | 1826207132117106688 |
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| author | Early, Kathleen |
| author2 | Henry I. Smith. |
| author_facet | Henry I. Smith. Early, Kathleen |
| author_sort | Early, Kathleen |
| collection | MIT |
| description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1991. |
| first_indexed | 2024-09-23T13:44:38Z |
| format | Thesis |
| id | mit-1721.1/13852 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T13:44:38Z |
| publishDate | 2005 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/138522019-04-10T17:26:06Z Experimental characterization and physical modeling of resolution limits in proximity printing x-ray lithography Early, Kathleen Henry I. Smith. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science Electrical Engineering and Computer Science Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1991. Includes bibliographical references (leaves 179-187). by Kathleen Regina Early. Ph.D. 2005-08-10T23:58:14Z 2005-08-10T23:58:14Z 1991 1991 Thesis http://hdl.handle.net/1721.1/13852 24652458 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 187 leaves 12734288 bytes 12734046 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Electrical Engineering and Computer Science Early, Kathleen Experimental characterization and physical modeling of resolution limits in proximity printing x-ray lithography |
| title | Experimental characterization and physical modeling of resolution limits in proximity printing x-ray lithography |
| title_full | Experimental characterization and physical modeling of resolution limits in proximity printing x-ray lithography |
| title_fullStr | Experimental characterization and physical modeling of resolution limits in proximity printing x-ray lithography |
| title_full_unstemmed | Experimental characterization and physical modeling of resolution limits in proximity printing x-ray lithography |
| title_short | Experimental characterization and physical modeling of resolution limits in proximity printing x-ray lithography |
| title_sort | experimental characterization and physical modeling of resolution limits in proximity printing x ray lithography |
| topic | Electrical Engineering and Computer Science |
| url | http://hdl.handle.net/1721.1/13852 |
| work_keys_str_mv | AT earlykathleen experimentalcharacterizationandphysicalmodelingofresolutionlimitsinproximityprintingxraylithography |