The reaction of molecular fluorine with silicon(100) : adsorption, desorption, and scattering dynamics

Thesis: Ph. D., Massachusetts Institute of Technology, Department of Chemistry, 1990

Bibliographic Details
Main Author:	Schulberg, Michelle Tobi.
Other Authors:	Massachusetts Institute of Technology. Department of Chemistry
Format:	Thesis
Published:	Massachusetts Institute of Technology 2021
Subjects:	Chemistry
Online Access:	https://hdl.handle.net/1721.1/138564

Internet

https://hdl.handle.net/1721.1/138564