Quantification and reduction of Poisson-Gaussian mixed noise induced errors in ellipsometry
Ellipsometry is an important metrology tool in a plethora of industries. The measurement accuracy can be significantly affected by the existence of Poisson-Gaussian mixed noise. This paper quantifies the induced error on normalized Mueller matrix measurements through statistical analysis. A method i...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
The Optical Society
2022
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| Online Access: | https://hdl.handle.net/1721.1/139762 |