Deep Learning for Rapid Analysis of Spectroscopic Ellipsometry Data
High-throughput experimental approaches to rapidly develop new materialsrequire high-throughput data analysis methods to match. Spectroscopic ellips-ometry is a powerful method of optical properties characterization, but forunknown materials and/or layer structures the data analysis using traditiona...
| Main Authors: | , , , , |
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| Other Authors: | |
| Format: | Article |
| Published: |
Wiley
2022
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| Online Access: | https://hdl.handle.net/1721.1/139811 |