Designing and Fabricating 3D Nanostructures through Directed Self-Assembly of Block Copolymers
Intricate designs of 3D nanostructures are needed in different research areas. Our current techniques for fabrication of 3D structures are limited by either length scale or efficiency. Compared to the conventional methods such as ‘top-down’ lithography, self-assembly of block copolymer (BCP) provide...
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| Format: | Thesis |
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Massachusetts Institute of Technology
2022
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| Online Access: | https://hdl.handle.net/1721.1/139939 |